晶圆片生产线_MES
6寸fab前道生产线_MES+EAP
5寸Fab功率器件前道生产线_MES+SPC
8/12寸晶圆片生产线_EAP
8寸Fab前道生产线_EAP
4/5寸Fab前道生产线_MES
6寸Fab前道生产线_MES+SPC
6寸Fab前道生产线_MES+SPC+EAP
6寸Fab前道生产线_MES+SPC+EDA
MEMS中试线_MES